The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

• Victor Deinhart,
• Lisa-Marie Kern,
• Jan N. Kirchhof,
• Sabrina Juergensen,
• Joris Sturm,
• Enno Krauss,
• Thorsten Feichtner,
• Sviatoslav Kovalchuk,
• Michael Schneider,
• Dieter Engel,
• Bastian Pfau,
• Bert Hecht,
• Kirill I. Bolotin,
• Stephanie Reich and
• Katja Höflich

Beilstein J. Nanotechnol. 2021, 12, 304–318, doi:10.3762/bjnano.12.25

• electrically contact the graphene sheet and actuate the resonators electrostatically. The motion of the devices is detected using a Michelson interferometer [48]. Figure 6a depicts a secondary electron HIM image of a patterned trampoline graphene resonator. A He ion current of 3 pA was employed at an

Finite-size effect on the dynamic and sensing performances of graphene resonators: the role of edge stress

• Chang-Wan Kim,
• Mai Duc Dai and
• Kilho Eom

Beilstein J. Nanotechnol. 2016, 7, 685–696, doi:10.3762/bjnano.7.61

• the coordination numbers of bulk atoms and edge atoms of graphene. It is shown that as the size of a graphene resonator decreases, the edge stress depending on the edge structure of a graphene resonator plays a critical role on both its dynamic and sensing performances. We found that the resonance

• behavior of graphene can be tuned not only through edge stress but also through nonlinear vibration, and that the detection sensitivity of a graphene resonator can be controlled by using the edge stress. Our study sheds light on the important role of the finite-size effect in the effective design of

• graphene resonators for their mass sensing applications. Keywords: edge stress; graphene resonator; mass sensing; nonlinear vibration; size effect; sensitivity; Introduction Recent advances in nanotechnology have allowed for the development of nano-electro-mechanical system (NEMS) devices that can